Parker says ultra-high purity diaphragm valve delivers extended life in slurry applications
The flow control of slurry and aggressive fluids in semiconductor and clean-area applications is simplified by a new fluoroploymer diaphragm valve from the Partek operation of Parker Hannifin. Called the 20 Series, the valve features a flow path and valve seat area that optimizes fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media.
Compliant with the SEMI-F57-0301 standard for polymer components, Partek’s new valve has a body machined from virgin 100% ultra-high purity PTFE for superior chemical resistance, and a one-piece, precision-machined diaphragm. It is available initially in three orifice sizes of 1/4, 1/2 and 1 inch, with port sizes ranging from 1/4 to 1-1/4 inches, and can be supplied with industry-standard Parflare or Nippon Pillar S300 end connections. The design of the valve is optimized to save critical clean room and sub-fab space; for example, the 1/4 inch version has a body size measuring just 1.5 x 1.25 x 2.91 inches (L x W x H). Both manual and pneumatically actuated configurations are available.
Advanced performance and reliability are key features of the valve. An angled and rounded flow path, plus an open and swept bowl shape around the diaphragm, minimize turbulence and eliminate sharp angles that can cause fluid shear — optimizing flow and protecting against entrapment and erosion in slurry, DI water, and chemical applications. These factors allow the Partek 20 Series valve to deliver superior flow rates, with Cv figures of 0.76, 3.9 and 13.5 for the 1/4, 1/2 and 1 inch variants respectively. A self-draining design further aids reliability when used with aggressive fluids in an open-loop system.
The design makes the valve particularly suitable for handling abrasive and corrosive slurry fluids, such as such those found in the CMP (chemical-mechanical planarization or chemical-mechanical polishing) processes employed in semiconductor fabrication. The valve is also suitable for a wide range of other clean area processing and analytical applications, such as controlling the flow of acids, chemicals, and DI water.
The range of sizes and port connections available, plus the choice of pneumatic or manual variants, provides a versatile platform for building instrumentation and processing systems. In addition, Partek will integrate the valve into a custom manifold assembly (CASY) for clients, and will soon release a three-way configuration — further extending system building possibilities.
The Fitting Authority
Since 1924, Parker Hannifin Corporation has served the marketplace with dependable fluid power
technology. Much of that expertise originates with Parker’s precision-made tube fittings, which were among the first products manufactured by the company. As such, they reflect Parker’s ongoing commitment to excellence. With more than a half century of experience in product design, engineering and manufacturing, the Tube Fittings Division holds a leadership position few other manufacturers can claim. This leadership is further heightened and enhanced by the technology-sharing only possible in Parker’s corporate family.
Parker manufactures a broad line of tube fitting and adapters including the Triple-Lok® fitting (37° flare), Ferulok® fitting (flareless), Intru-lok® fitting (brass flareless), EO® fitting (metric flareless), EO®-2 fitting (metric flareless with elastomeric seal), Seal-LokTM fitting (O-ring face seal), Pipe Fittings and Adapters, JIS fittings, Hydraulic Flanges and Adapters, which are offered in a variety of port ends – NPTF, SAE Straight Thread, BSPP, BSPT, ISO and metric. This along with an extensive line of tube fabrication equipment and tube and hose clamps make up the broadest product offering in the industry.
Contact: kate.taylor@4cm.co.uk, www.parker.com, TFDmailbox@parker.com.